Funding for this research was provided by:
Science and Engineering Research Board (YSS/2014/000830)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Nanomechanical characterization of SU8/ZnO nanocomposite films for applications in energy-harvesting microsystems
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-06-29
Date accepted: 2018-09-13
Online publication date: 2018-10-03