Pilloni, Oscar https://orcid.org/0000-0002-0508-6718
Madou, Marc https://orcid.org/0000-0003-4847-3117
Mendoza, Doroteo https://orcid.org/0000-0002-7867-6188
Muhl, Stephen https://orcid.org/0000-0001-7185-0537
Oropeza-Ramos, Laura https://orcid.org/0000-0002-7311-3204
Funding for this research was provided by:
DGAPA-PAPIIT-UNAM (IN106316, IN115116)
Consejo Nacional de Ciencia y Tecnología (Fronteras de la Ciencia 344, Project #269280, Scholarship 487698)
Journal title: Journal of Micromechanics and Microengineering
Article type: note
Article title: Methodology and fabrication of adherent and crack-free SU-8 photoresist-derived carbon MEMS on fused silica transparent substrates
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2018-08-16
Date accepted: 2018-12-07
Online publication date: 2019-01-11