Lai, Liyan https://orcid.org/0000-0002-8268-0665
Sun, Yunna https://orcid.org/0000-0001-7393-2827
Wu, Hao
Yang, Zhuoqing
Ding, Guifu
Funding for this research was provided by:
Advanced Research Ministry of Education Joint Foundation (6141A020224)
National Natural Science Foundation of China (61571287)
Shanghai Professional Technical Service Platform for Non-Silicon Micro-Nano Integrated Manufacturing (16DZ2290103)
SJTU-SMC Young Scholar Program (16X100080044)
Journal title: Journal of Micromechanics and Microengineering
Article type: note
Article title: Enhanced adhesive strength between SU-8 photoresist and titanium substrate by an improved anodic oxidation method for high aspect-ratio microstructures
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2018-09-07
Date accepted: 2019-01-18
Online publication date: 2019-02-22