Funding for this research was provided by:
Lower Saxony Ministry for Science and Culture (LENA-OptoSense)
China Scholarship Council (CSC 201506300019)
State of Lower Saxony (Quantum- and Nanometrology (QUANOME)
State of Lower Saxony (NP 2-2)
Journal title: Journal of Micromechanics and Microengineering
Article type: rev
Article title: Piezoresistive microcantilevers for humidity sensing
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2018-10-23
Date accepted: 2019-03-05
Online publication date: 2019-04-04