Adderson, Ryan https://orcid.org/0000-0002-2416-4646
Hubbard, Ted https://orcid.org/0000-0001-9393-1696
Funding for this research was provided by:
Natural Sciences and Engineering Research Council of Canada
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Millipixel image correlation for sub nm measurement of MEMS motion
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-06-03
Date accepted: 2019-08-28
Online publication date: 2019-09-19