Funding for this research was provided by:
H2020 European Research Council (340931)
H2020 Future and Emerging Technologies (665347)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Design and fabrication strategy for an efficient lead zirconate titanate based piezoelectric micromachined ultrasound transducer
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-07-04
Date accepted: 2019-09-17
Online publication date: 2019-10-04