Funding for this research was provided by:
Foundation of China (6141B08100303)
Science Fund for Creative Research Groups of NSFC (51621064)
National Natural Science Foundation of China (51675076)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Multidirectional monolayer metal nano-grating micro polarizer array based on nanoimprint lithography and plasma ashing process
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-01-17
Date accepted: 2019-09-17
Online publication date: 2019-10-09