Funding for this research was provided by:
Foundation of China (6141B08100303)
Science Fund for Creative Research Groups of NSFC (51621064)
National Natural Science Foundation of China (51675076)
Article Title: Multidirectional monolayer metal nano-grating micro polarizer array based on nanoimprint lithography and plasma ashing process
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-01-17
Date Accepted: 2019-09-17
Online publication date: 2019-10-09