Kawakami, Kouki
Kaneuchi, Shunya
Tanigawa, Hiroshi
Suzuki, Kenichiro https://orcid.org/0000-0002-1648-8528
Article Title: MEMS resonator with wide frequency tuning range and linear response to control voltages for use in voltage control oscillators
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2019-06-27
Date Accepted: 2019-09-26
Online publication date: 2019-10-16