Funding for this research was provided by:
Directorate for Engineering (EEC-1028725)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Microfabrication of multi-layer glassy carbon microstructures through dye-doped negative photoresists
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-06-17
Date accepted: 2019-09-26
Online publication date: 2019-10-23