Platz, Daniel https://orcid.org/0000-0002-5923-0279
Schmid, Ulrich
Journal title: Journal of Micromechanics and Microengineering
Article type: rev
Article title: Vibrational modes in MEMS resonators
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2018-10-17
Date accepted: 2019-10-07
Online publication date: 2019-10-25