Marton, Marian https://orcid.org/0000-0002-4828-4394
Ritomsky, Mario
Rehacek, Vlastimil https://orcid.org/0000-0003-0618-4747
Michniak, Pavol
Behul, Miroslav
Novak, Patrik
Vanco, Lubomir
Vojs, Marian
Funding for this research was provided by:
Vedecká Grantová Agentúra MŠVVaŠ SR a SAV (1/0558/17, 1/0828/16)
Agentúra na Podporu Výskumu a Vývoja (APVV-16-0124, APVV-16-0319)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-06-28
Date accepted: 2019-10-14
Online publication date: 2019-11-04