Vafaie, Ali https://orcid.org/0000-0002-8309-1280
Tahmasebipour, Mohammad https://orcid.org/0000-0002-4343-4250
Tahmasebipour, Younes
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: A novel capacitive micro-accelerometer made of steel using micro wire electrical discharge machining method
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-08-13
Date accepted: 2019-10-16
Online publication date: 2019-11-05