Abdel Aziz, Ahmed K S https://orcid.org/0000-0001-7643-9974
Bakri-Kassem, Maher https://orcid.org/0000-0001-6319-3178
Mansour, Raafat R
Article Title: Design and characterization of compact digital RF MEMS capacitors and phase shifters in CMOS 0.35 µ m technology
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-09-09
Date Accepted: 2020-01-30
Online publication date: 2020-02-20