Bozyigit, Mustafa Anil https://orcid.org/0000-0002-5160-239X
Sahin, Asaf Behzat
Bayram, Baris https://orcid.org/0000-0001-6243-5884
Funding for this research was provided by:
Türkiye Bilimsel ve Teknolojik Araştirma Kurumu (117E066)
Article Title: Design and characterization of a buckling-resistant perforated MEMS membrane under residual stress
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-12-30
Date Accepted: 2020-02-26
Online publication date: 2020-04-06