Bozyigit, Mustafa Anil https://orcid.org/0000-0002-5160-239X
Sahin, Asaf Behzat
Bayram, Baris https://orcid.org/0000-0001-6243-5884
Funding for this research was provided by:
Türkiye Bilimsel ve Teknolojik Araştirma Kurumu (117E066)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Design and characterization of a buckling-resistant perforated MEMS membrane under residual stress
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2019-12-30
Date accepted: 2020-02-26
Online publication date: 2020-04-06