Nilsen, Madeleine https://orcid.org/0000-0003-3035-4718
Dannberg, Oliver
Fröhlich, Thomas
Strehle, Steffen https://orcid.org/0000-0002-1261-2894
Funding for this research was provided by:
Bundesministerium für Bildung und Forschung (13N12545)
Article Title: Direct polymer microcantilever fabrication from free-standing dry film photoresists
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd
Publication dates
Date Received: 2020-03-13
Date Accepted: 2020-06-18
Online publication date: 2020-06-30