Qu, Minni https://orcid.org/0000-0002-7151-8275
Xu, Jian
Tian, Miao
Wu, Liying
Shen, Yunliang
Cheng, Xiulan
Wang, Ying
Funding for this research was provided by:
Key Research and Development Program of High Performance Computing in the 13th Five-Year Plan of the Ministry of Science and Technology of China (No.2016YFB0200205)
Shanghai R&D Public Service Platform Construction Project in 2018 (No.18DZ2295400)
the Jue Ce Zi Xun Research Fund of Shanghai Jiao Tong University (No. JCZXSJB2018-022)
the Medical-Engineering (Science) Cross-Research Fund of Shanghai Jiao Tong University (No. ZH2018ZDB01)
Article Title: Ten-nanometer-depth lithium niobate nanostructures with sub-nanometer surface roughness
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2020-05-19
Date Accepted: 2020-06-30
Online publication date: 2020-07-15