Toda, Masaya https://orcid.org/0000-0003-3849-6948
Nakamura, Taichi
Inomata, Naoki https://orcid.org/0000-0003-2048-0913
Toan, Nguyen Van https://orcid.org/0000-0001-8946-8299
Ono, Takahito https://orcid.org/0000-0002-0927-9066
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Bridged resonator based on assembled Si thin wire
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2020-05-17
Date accepted: 2020-07-16
Online publication date: 2020-08-27