Toda, Masaya https://orcid.org/0000-0003-3849-6948
Nakamura, Taichi
Inomata, Naoki https://orcid.org/0000-0003-2048-0913
Toan, Nguyen Van https://orcid.org/0000-0001-8946-8299
Ono, Takahito https://orcid.org/0000-0002-0927-9066
Article Title: Bridged resonator based on assembled Si thin wire
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-05-17
Date Accepted: 2020-07-16
Online publication date: 2020-08-27