Article Title: A rapid technique to integrate micro-components on released MEMS dies using SU-8
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-06-09
Date Accepted: 2020-09-03
Online publication date: 2020-09-15