Vergara, Andrea https://orcid.org/0000-0002-8747-7092
Tsukamoto, Takashiro https://orcid.org/0000-0002-7614-7717
Fang, Weileun https://orcid.org/0000-0002-6000-026X
Tanaka, Shuji
Funding for this research was provided by:
Japan Society for the Promotion of Science (18H01390)
Article Title: Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd
Publication dates
Date Received: 2020-06-04
Date Accepted: 2020-09-10
Online publication date: 2020-09-28