Nimura, Kyosuke
Osaka, Kenji
Sawada, Kazuma
Uesugi, Akio https://orcid.org/0000-0002-7913-3679
Sugano, Koji https://orcid.org/0000-0002-0780-0110
Isono, Yoshitada https://orcid.org/0000-0003-2370-3246
Funding for this research was provided by:
JSPS KAKENHI (Grant Number JP16K14135)
Article Title: Three-axis force sensor miniaturized by 3D microstructuring using high-temperature punch creep-forming process
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-09-08
Date Accepted: 2020-12-09
Online publication date: 2021-01-08