Kayed, Mohammed O https://orcid.org/0000-0002-9447-1203
Balbola, Amr A https://orcid.org/0000-0002-1955-6514
Lou, Edmond
Moussa, Walied A https://orcid.org/0000-0001-7385-0469
Funding for this research was provided by:
Natural Sciences and Engineering Research Council of Canada
CMC Microsystems
Article Title: Development of MEMS-based piezoresistive 3D stress/strain sensor using strain technology and smart temperature compensation
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-03-09
Date Accepted: 2021-01-14
Online publication date: 2021-02-08