Wu, Haibin https://orcid.org/0000-0001-9201-428X
Zheng, Xudong
Wang, Xuetong
Shen, Yaojie
Jin, Zhonghe
Ma, Zhipeng https://orcid.org/0000-0003-2891-3410
Funding for this research was provided by:
National Science Fund for Distinguished Young Scholars of China (61525403)
Zhejiang Provincial Basic Public Welfare Research Program of China (GG20F040007)
Article Title: Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2020-12-19
Date Accepted: 2021-03-04
Online publication date: 2021-04-01