Zhang, Renchang
Li, Qian
Tian, Lu
Gong, Jiahao
Li, Zhengming
Liu, Wei
Funding for this research was provided by:
National Natural Science Foundation of China (31427801)
Science and Technology Program from State Grid Corporation of China (5700-201955318A-0-0-00)
National Key Research and Development Program of China (2019YFB2204903)
Article Title: On-chip micro pressure sensor for microfluidic pressure monitoring
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2020-10-25
Date Accepted: 2021-03-24
Online publication date: 2021-04-13