Mohammad, Tarek https://orcid.org/0000-0003-0081-6803
He, Siyuan https://orcid.org/0000-0002-6954-1206
Ben Mrad, Ridha
Funding for this research was provided by:
Natural Sciences and Engineering Research Council of Canada
Article Title: Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-02-03
Date Accepted: 2021-04-21
Online publication date: 2021-05-11