Pitchappa, Prakash http://orcid.org/0000-0002-6168-4130
Kumar, Abhishek
Singh, Ranjan http://orcid.org/0000-0001-8068-7428
Lee, Chengkuo http://orcid.org/0000-0002-8886-3649
Wang, Nan http://orcid.org/0000-0003-1285-7530
Funding for this research was provided by:
Agency for Science, Technology and Research (A18A5b0056)
Article Title: Terahertz MEMS metadevices
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-02-24
Date Accepted: 2021-08-18
Online publication date: 2021-09-17