Wang, Jiachou https://orcid.org/0000-0002-3884-620X
Xue, Dan
Li, Xinxin https://orcid.org/0000-0001-6760-0957
Funding for this research was provided by:
the Ministry of Science and Technology of China
Article Title: Silicon monolithic microflow sensors: a review
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-03-17
Date Accepted: 2021-08-19
Online publication date: 2021-09-01