Wu, Haitao
Lai, Leijie https://orcid.org/0000-0002-8767-4715
Zhang, Liqiang
Zhu, Limin https://orcid.org/0000-0003-3194-6731
Funding for this research was provided by:
Natural Science Foundation of Shanghai (21ZR1426000)
National Natural Science Foundation of China (51605275)
Article Title: Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-07-14
Date Accepted: 2021-08-27
Online publication date: 2021-09-09