Aguinsky, Luiz Felipe https://orcid.org/0000-0003-4722-0636
Wachter, Georg
Manstetten, Paul https://orcid.org/0000-0002-9083-6068
Rodrigues, Frâncio https://orcid.org/0000-0002-1594-4966
Trupke, Michael
Schmid, Ulrich
Hössinger, Andreas
Weinbub, Josef https://orcid.org/0000-0001-5969-1932
Funding for this research was provided by:
TU Wien Bibliothek (Open Access Funding Programme)
Austrian Federal Ministry for Digital and Economic Affairs, the National Foundation for Research, Technology and Development and the Christian Doppler Research Association
Horizon 2020 Framework Programme (QuanTELCO)
Österreichische Forschungsförderungsgesellschaft (QSense4Power)
Austrian Science Fund (SiC-EiC)
Article Title: Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-05-24
Date Accepted: 2021-09-30
Online publication date: 2021-10-19