Le, Xianhao
Shi, Qiongfeng
Vachon, Philippe
Ng, Eldwin J.
Lee, Chengkuo https://orcid.org/0000-0002-8886-3649
Funding for this research was provided by:
National Key Research and Development Program of China (2019YFB2004800)
RIE advanced manufacturing and engineering (AME) programmatic grant (A18A4b0055)
Article Title: Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-08-26
Date Accepted: 2021-11-17
Online publication date: 2021-12-03