Funding for this research was provided by:
Natural Science Foundation of Zhejiang Province (Q13F040001)
National Natural Science Foundation of China (61404122)
Article Title: A Si-based suspended tunnel structure with trapezoidal section by two-step etching
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2021-08-22
Date Accepted: 2021-12-17
Online publication date: 2022-01-04