Liu, Chen
Li, Minghua
Chen, Bangtao
Zhang, Ying
Zhu, Yao
Wang, Nan
Funding for this research was provided by:
Science and Engineering Research Council of A*STAR (Agency for Science, Technology and Research), Singapore (A20G9b0135)
Article Title: Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-10-04
Date Accepted: 2022-01-05
Online publication date: 2022-01-28