Arscott, Steve https://orcid.org/0000-0001-9938-2683
Funding for this research was provided by:
French RENATECH network
Article Title: On overtravel and skate in cantilever-based probes for on-wafer measurements
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-12-01
Date Accepted: 2022-02-04
Online publication date: 2022-02-18