Hu, Xiao https://orcid.org/0000-0002-2913-7495
Zhen, Zhihan
Sun, Guotao https://orcid.org/0000-0002-7138-4975
Wang, Qingkang
Huang, Qiyu https://orcid.org/0000-0001-9494-144X
Article Title: Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-11-03
Date Accepted: 2022-02-18
Online publication date: 2022-03-07