Zhou, Wenhan
Zhang, Haozhi
Chen, Pu
Ni, Zao
Li, Wei
Wang, Jiachou https://orcid.org/0000-0002-3884-620X
Li, Xinxin https://orcid.org/0000-0001-6760-0957
Funding for this research was provided by:
National Science Foundation of China (61834007)
Article Title: Single-side micromachined ultra-small thermopile IR detecting pixels for dense-array integration
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2021-11-27
Date Accepted: 2022-03-10
Online publication date: 2022-03-23