Xu, Qianfeng https://orcid.org/0000-0002-1985-7018
Fang, Dan
Zhang, Xiaodong https://orcid.org/0000-0002-7528-9828
Chen, Yu
Wang, Xiaohua
Cai, Yong
Zhang, Baoshun
Wei, Zhipeng https://orcid.org/0000-0003-3452-6978
Funding for this research was provided by:
Foundation of CAEP Ultra-precision Machining Technology Key Laboratory under Project (ZM18008)
Natural Science Foundation of Jiangsu Province, China (BK20191195)
National Natural Science Foundation of China (61774014)
Article Title: Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-12-22
Date Accepted: 2022-03-30
Online publication date: 2022-04-11