Şimşek, Sevda
Vahid, Ebrahimpour Ahmadi
Çelik, Süleyman
Sayar, Ersin https://orcid.org/0000-0001-7764-9332
Koşar, Ali https://orcid.org/0000-0001-6283-6717
Article Title: Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-10-25
Date Accepted: 2022-04-22
Online publication date: 2022-05-06