Garg, Manu https://orcid.org/0000-0001-6752-9812
Arya, Dhairya Singh
Kumar, Sushil
Yousuf, Mujeeb
Chiu, Yi https://orcid.org/0000-0002-1149-9228
Singh, Pushpapraj https://orcid.org/0000-0002-5894-7534
Funding for this research was provided by:
Impacting Research Innovation and Technology (IMP/2018/600869)
Article Title: Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2021-11-25
Date Accepted: 2022-04-26
Online publication date: 2022-06-01