Funding for this research was provided by:
Yangfan Project (19YF1433900)
National Natural Science Foundation of China (62104146)
ShanghaiTech Start-up Project (2018F0203-000-08)
Article Title: An A 0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2022-03-17
Date Accepted: 2022-07-20
Online publication date: 2022-08-02