Liu, Shih-Chi
Cheng, Hao-Chien
Chen, Si-Han
Lin, Hung-Yu
Hsu, Chih-Chen
Shih, Fuchi
Liang, Kai-Chih
Wu, Mingching
Fang, Weileun https://orcid.org/0000-0002-6000-026X
Funding for this research was provided by:
ministry of science and technology (109-2923-E-007 -007 -)
ministry of economic affairs (MOEA) of Taiwan
Coretronic MEMS Corporation
Article Title: On the design of piezoelectric actuator for 1D MEMS scanning mirror applications
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2022-09-04
Date Accepted: 2023-01-19
Online publication date: 2023-02-01