Morikawa, Kyojiro https://orcid.org/0000-0002-9163-9373
Chen, Po-yin
Tran, Hai Linh https://orcid.org/0000-0001-9312-4624
Kazoe, Yutaka https://orcid.org/0000-0002-8334-6730
Chen, Chihchen https://orcid.org/0000-0002-2195-4802
Kitamori, Takehiko https://orcid.org/0000-0003-2969-6550
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST 109-2639-E-007-001-ASP)
Japan Society for the Promotion of Science (19K15417)
Article Title: Fused silica microchannel fabrication with smooth surface and high etching selectivity
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2022-12-21
Date Accepted: 2023-02-23
Online publication date: 2023-03-02