Funding for this research was provided by:
National Natural Science Foundation of China (62074032)
National Key R&D Program of China (2022YFB3203600)
Article Title: High-reliability circular-contact RF MEMS switches in silicon hermetic package
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2023 IOP Publishing Ltd
Publication dates
Date Received: 2023-02-09
Date Accepted: 2023-04-12
Online publication date: 2023-04-21