Li, Jiamin
Zhang, Jie
Qin, Lei
Lv, Luyu
Liu, Tianxiang
Zhang, Yanting
Dhakal, Rajendra https://orcid.org/0000-0002-3550-5581
Li, Xiao
Liu, Tian https://orcid.org/0000-0002-2906-5110
Li, Yuanyue https://orcid.org/0000-0001-9964-0793
Yao, Zhao https://orcid.org/0000-0003-3030-4614
Article Title: A flexible and highly sensitive capacitive pressure sensor with fast response based on a hierarchically micro-structured PDMS dielectric layer
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2023-04-12
Date Accepted: 2023-06-28
Online publication date: 2023-07-07