Takahashi, Hidetoshi https://orcid.org/0000-0002-0754-3281
Takei, Yusuke
Noda, Kentaro
Matsumoto, Kiyoshi
Shimoyama, Isao
Funding for this research was provided by:
Japan Society for the Promotion of Science (25000010)
Article Title: Triaxial piezoresistive force sensor probe with high sensitivity and stiffness using 3D notch structure
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2023-06-23
Date Accepted: 2023-10-06
Online publication date: 2023-11-02