Garg, Manu https://orcid.org/0000-0001-6752-9812
Arya, Dhairya Singh
Kumar, Sushil
Joshi, Khanjan
Yousuf, Mujeeb https://orcid.org/0000-0002-2828-1815
Chiu, Yi https://orcid.org/0000-0002-1149-9228
Singh, Pushpapraj https://orcid.org/0000-0002-5894-7534
Funding for this research was provided by:
Impacting Research Innovation and Technology (IMP/2018/600869)
Ministry of Science and Technology, Taiwan (MOST 110-2221-E-A49-071-MY2)
Article Title: Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-08-10
Date Accepted: 2024-01-04
Online publication date: 2024-01-12