Qi, Xuanmeng https://orcid.org/0000-0002-4460-184X
Yoshida, Shinya
Risquez, Sarah
Ghosh, Anirban
Moridi, Mohssen
Tanaka, Shuji
Funding for this research was provided by:
Adaptable and Seamless Technology Transfer Program through Target-Driven R and D (JPMJTR20R8)
Japan Society for the Promotion of Science (22J10831)
Article Title: Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2023-05-19
Date Accepted: 2024-01-26
Online publication date: 2024-02-14