Tu, Cheng https://orcid.org/0000-0002-4655-6202
Zhang, Ting-yang
Zhang, Zhuo
Huang, Qin-wen
Zhang, Xiao-sheng https://orcid.org/0000-0001-9719-0573
Funding for this research was provided by:
National Key R&D Program (2022YFB3203602)
National Natural Science Foundation of China (61804023)
Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory (ZHD202108)
Article Title: Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-12-05
Date Accepted: 2024-03-01
Online publication date: 2024-03-12