Funding for this research was provided by:
Scientific Research Fund of Second Institute of Oceanography (SL2020ZD205)
Key R&D Program of China (2020YFB1313502)
Oceanic Interdisciplinary Program of Shanghai Jiao Tong University (SL2020MS017)
Article Title: Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-11-24
Date Accepted: 2024-04-24
Online publication date: 2024-05-14