Lin, Chia-Hao https://orcid.org/0009-0009-9002-5300
Wei, Ting-Chou
Tseng, Chin
Hu, Zih-Song https://orcid.org/0009-0006-0187-5425
Lai, Mei-Feng
Fang, Weileun https://orcid.org/0000-0002-3309-0407
Funding for this research was provided by:
National Science and Technology Council (NSTC 111-2221-E-007)
NSTC (111-2221-E-007)
National Tsing Hua University
Center for Nanotechnology, Materials Science and Microsystems
Nano-Electro-Mechanical-System Research Center of National Taiwan University, Taiwan
Semiconductor Research
Materials Analysis Technology Inc.
Nano Facility Center (NFC) of National Yang Ming Chiao Tung University
Article Title: Bandwidth enhancement of piezoelectric MEMS microspeaker via central diaphragm actuation and filter integration
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-06-07
Date Accepted: 2024-08-14
Online publication date: 2024-08-28