Nos, Jack https://orcid.org/0000-0001-8199-8834
Dussart, Rémi https://orcid.org/0000-0003-2001-5034
Tillocher, Thomas https://orcid.org/0000-0002-9160-5595
Lefaucheux, Philippe https://orcid.org/0000-0001-7889-8891
Boufnichel, Mohamed https://orcid.org/0000-0003-1653-6849
Funding for this research was provided by:
Agence Nationale de la Recherche (ANR-20-CE24-0014)
Article Title: Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-05-30
Date Accepted: 2024-09-12
Online publication date: 2024-09-23