Baradel, Baptiste https://orcid.org/0009-0004-3724-396X
Léon, Olivier https://orcid.org/0000-0002-2865-8037
Méry, Fabien https://orcid.org/0000-0003-1408-2003
Combette, Philippe
Giani, Alain https://orcid.org/0000-0003-0122-0534
Funding for this research was provided by:
Région Occitanie Pyrénées-Méditerranée (ALTDOC - 000671 / 19008715)
Article Title: Aspect ratio-dependent etching in silicon using XeF2: experimental investigation and comparative analysis with dry etching methods
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
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Publication dates
Date Received: 2024-08-29
Date Accepted: 2024-10-29
Online publication date: 2024-11-21